Silicon Photonic Micro-Ring Resonators for Chemical and Biological Sensing: A Tutorial

Silicon photonic micro-ring resonators (MRR) developed on the silicon-on-insulator (SOI) platform, owing to their high sensitivity and small footprint, show great potential for many chemical biological sensing applications such as label-free detection in environmental monitoring, biomedical engineering, food analysis. In this tutorial, we provide theoretical background give design guidelines SOI-based MRR well examples of surface functionalization procedures molecules. After introducing advantages perspectives MRR, fundamentals are described detail, followed by an introduction fabrication methods, which based a complementary metal-oxide semiconductor (CMOS) technology. Optimization is provided, with special emphasis optimization waveguide geometry. At point, difference between bulk explained, definitions like sensitivity, ring overall limit (LoD) introduced. Further, explain sodium chloride (NaCl) water recipe sensing.